Lumina AT1-Auto

The Lumina AT1-AUTO integrates the Lumina AT1 with a single arm robot/automated cassette handler for 150 and 200 mm circular wafers.

Instrument Specifications

  • Temperature: 18 - 30 °C
  • Voltage:           120/230 VAC
  • Current:           6 A/4 A
  • Weight:            TBD
  • Dimensions:   1580 x 2004 x 1308 mm

                              (62.2 x 78.9 x 51.5 in.)