Lumina AT1 System

The AT1 system is capable of scanning any flat shape less than or equal to 300 mm x 300 mm.

• Resilient: Capable of scanning fragile and thin samples

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• Adaptable: Scans transparent (glass), semiconductor, or metal substrates.

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• Efficient: Full-surface scan of 150 mm wafer in 3 minutes.

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• Sensitive: 100 nm PSL sensitivity on silicon and 150 nm PSL sensitivity on glass.

Instrument Specifications

• Temperature: 18 - 30 °C

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• Voltage:           120/230 VAC

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• Current:           6 A/4 A

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• Weight:            815 lbs/370 kg

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• Dimensions:   880 x 2005 x 743 mm

                            (34.6 x 79 x 29.2 in.)