Lumina AT2 System
The AT2 system is capable of scanning any flat shape less than or equal to
450mm x 450mm..
- Resilient: Capable of scanning fragile and thin samples.
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Robust: Dynamic beam tracker enables compensation for substrate bow and warp. Optional bow measurement module is also available.
- Efficient: Full-surface scan of 300mm wafer in 2 minutes.
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Sensitive: : 200nm PSL sensitivity on silicon and 300nm PSL sensitivity on glass.
Instrument Specifications
- Temperature: 18 - 30 °C
- Voltage: 120/230 VAC
- Current: 8 A/4 A
- Weight: 1058lbs lbs/480 kg
- Dimensions: 1037 x 1037 x 2005mm
(40.8 x 40.8 x 79 in.)