The AT1 has four detection channels. They operate simultaneously to generate four separate images. Each channel aids in detecting and classifying certain defects:
Film Defects, Stains
Scratches, Internal Stress*, Striations within Glass*
Scratches, Pits, Bumps, Surface Topography
*Reflectivity off of the top and bottom surfaces provides these results.
1. Once the sample is placed in the system:
A circular green laser beam moves in a linear raster.
The sample moves perpendicularly to the laser.
The reflected and scattered light is captured by the four detectors.
2. Analysis and Classification
LuminaSoft presents the images and classifies defects, providing information in a visual and easily accessible format. Reports may be saved as
3. Diamond Scribe
The optional diamond scribe marks the defects of interest to facilitate further analysis using other instrumentation such as SEM (Scanning Electron Microscope).
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